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This is a record of a document published elsewhere, first published by the United States Patent and Trademark Office, as US-12601409-B2, on 14 April 2026. OpenTechnical did not first disclose it. The identifier, hashes and timestamps below record what this library served and when, not when the material became public. View the original.

OT-2026-000000701

Gas exhaust apparatus and intake line automatic closing apparatus used for gas exhaust apparatus

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Classification
Industrial Motion & Power Transmission › Fluid Power
Original source
US-12601409-B2, the United States Patent and Trademark Office, 14 April 2026
Document SHA-256
d5793dd484b4fd2b6fe1f93103a49ac4aa9af7faf645a655a87a46008bb8fdda

Abstract

Provided is a gas exhaust apparatus for expelling a gas in a treatment space of a wafer treatment apparatus to outside, the gas exhaust apparatus including a main exhaust line connected to the treatment space, and an auxiliary exhaust line having an end connected to the main exhaust line to supply an external air current to the main exhaust line, wherein an automatic closer is disposed at another end of the auxiliary exhaust line to close the other end of the auxiliary exhaust line in a specific situation.

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Citation

OpenTechnical Publication OT-2026-000000701, “Gas exhaust apparatus and intake line automatic closing apparatus used for gas exhaust apparatus,” published September 15, 2026 at 19:03:16 UTC, https://opentechnical.org/p/OT-2026-000000701.

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