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This is a record of a document published elsewhere, first published by the United States Patent and Trademark Office, as US-12601411-B2, on 14 April 2026. OpenTechnical did not first disclose it. The identifier, hashes and timestamps below record what this library served and when, not when the material became public. View the original.

OT-2026-000000719

Powder protecting three-way valve with cylindrical heating element

Published
Permanent URL
Classification
Industrial Motion & Power Transmission › Fluid Power
Original source
US-12601411-B2, the United States Patent and Trademark Office, 14 April 2026
Document SHA-256
9191fded1301167740c18ab17e790b2010dffde08695849477e4fe2879c3f0b2

Abstract

A powder protecting three-way valve installed in a line of a semiconductor or flat panel display manufacturing apparatus to control flow of reaction by-product gas, includes: a valve casing comprising an inlet pipe through which the reaction by-product gas flows in and a plurality of outlet pipes through which the inflowing reaction by-product gas flows out in different directions; a rotating ball which is rotatably installed inside the valve casing and comprises an inlet hole communicating with the inlet pipe of the valve casing and outlet holes selectively communicating with the plurality of outlet pipes of the valve casing to control a direction of the flow of the reaction by-product gas; and a heating element installed in the valve casing to heat the inside of the valve casing.

Publication information

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Citation

OpenTechnical Publication OT-2026-000000719, “Powder protecting three-way valve with cylindrical heating element,” published September 15, 2026 at 19:03:17 UTC, https://opentechnical.org/p/OT-2026-000000719.

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This record reproduces a document published elsewhere and is provided for reference and study. Rights in the original remain with its owner. See the publication policy.