OpenTechnical
This is a record of a document published elsewhere, first published by the United States Patent and Trademark Office, as US-12599989-B2, on 14 April 2026. OpenTechnical did not first disclose it. The identifier, hashes and timestamps below record what this library served and when, not when the material became public. View the original.

OT-2026-000000802

Laser processing method that includes use of a sheet that has transmissibility

Published
Permanent URL
Classification
Manufacturing & Assembly Equipment › Joining and Welding
Original source
US-12599989-B2, the United States Patent and Trademark Office, 14 April 2026
Document SHA-256
a7c245130f5d649ae85cc5cc05a101df311a3f2cdda974b8b7513e085c12b529

Abstract

A processing method includes a holding step of holding a workpiece by a chuck table including a holding surface that holds the workpiece in an upper surface and a sheet covering step of covering the upper surface of the chuck table in addition to the workpiece by a sheet having transmissibility. The processing method also includes a close contact step of generating a suction force for the holding surface of the chuck table and reducing the pressure on a region covered by the sheet to bring the workpiece into close contact with the upper surface of the chuck table by an atmospheric pressure applied to the sheet and a modified layer forming step of positioning the focal point of a laser beam inside the workpiece through the sheet and irradiating the workpiece with the laser beam to form a modified layer.

Publication information

Plain textMarkdownManifestIntegrity record

Citation

OpenTechnical Publication OT-2026-000000802, “Laser processing method that includes use of a sheet that has transmissibility,” published September 15, 2026 at 19:03:24 UTC, https://opentechnical.org/p/OT-2026-000000802.

To cite specific content, add the paragraph or figure numbers.

Terms

This record reproduces a document published elsewhere and is provided for reference and study. Rights in the original remain with its owner. See the publication policy.