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This is a record of a document published elsewhere, first published by the United States Patent and Trademark Office, as US-12589474-B2, on 31 March 2026. OpenTechnical did not first disclose it. The identifier, hashes and timestamps below record what this library served and when, not when the material became public. View the original.

OT-2026-000001338

Seal insertion tool for a fluid delivery module and method of installing a seal into a fluid delivery module

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Classification
Tools & Tooling › Clamping Tools
Inventors
CARSON STEPHEN, TREUR RANDOLPH
Assignee
ICHOR SYSTEMS INC
Original source
US-12589474-B2, the United States Patent and Trademark Office, 31 March 2026
Document SHA-256
e7e1422a8da7b45b4872a7d8d2cbaa473bdd703249164e15fb02c27ba362c962

Abstract

Apparatuses for controlling fluid flow are important components for delivering process fluids for semiconductor fabrication. These apparatuses for controlling fluid flow require a variety of fluid flow components which are tightly packaged within the apparatuses for controlling flow. Servicing the apparatuses requires specialized equipment and methods which enable installation of seals in close quarters in apparatuses which are installed in the field. Seal retainers may be used to retain the seals during assembly of fluid flow components into apparatus for controlling flow.

Publication information

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Citation

OpenTechnical Publication OT-2026-000001338, “Seal insertion tool for a fluid delivery module and method of installing a seal into a fluid delivery module,” published September 15, 2026 at 19:05:08 UTC, https://opentechnical.org/p/OT-2026-000001338.

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This record reproduces a document published elsewhere and is provided for reference and study. Rights in the original remain with its owner. See the publication policy.