OpenTechnical
This is a record of a document published elsewhere, first published by the United States Patent and Trademark Office, as US-12593653-B2, on 31 March 2026. OpenTechnical did not first disclose it. The identifier, hashes and timestamps below record what this library served and when, not when the material became public. View the original.

OT-2026-000001365

Transfer unit and substrate treatment apparatus including the same

Published
Permanent URL
Classification
Robotics & Automation › Robot Architectures
Inventors
SON DUK HYUN
Assignee
SEMES CO LTD
Original source
US-12593653-B2, the United States Patent and Trademark Office, 31 March 2026
Document SHA-256
fb9333cd1b623372edea780dd4c14f6a8cfaf9594de7753116383b5d5989d7ab

Abstract

Provided are a transfer unit and a substrate treatment apparatus which can stably vacuum-adsorb a substrate and can be used for a long time. The transfer unit includes: a robot arm; and an end effector connected to the robot arm, wherein the end effector includes: a body; a vacuum hole formed in the body; and a pad installed on the body to surround the vacuum hole and including a first pad layer and a second pad layer stacked sequentially, wherein the first pad layer has greater elasticity than the second pad layer, and the second pad layer has greater hardness than the first pad layer.

Publication information

Plain textMarkdownManifestIntegrity record

Citation

OpenTechnical Publication OT-2026-000001365, “Transfer unit and substrate treatment apparatus including the same,” published September 15, 2026 at 19:05:23 UTC, https://opentechnical.org/p/OT-2026-000001365.

To cite specific content, add the paragraph or figure numbers.

Terms

This record reproduces a document published elsewhere and is provided for reference and study. Rights in the original remain with its owner. See the publication policy.