Abstract
There is a teaching method for a substrate transfer device is disclosed. The method includes moving a transfer arm to multiple set positions along a reference axis selected from multiple axes extending through a center and a periphery of a placing surface, and executing at each set position a cycle comprising: moving the transfer arm holding a substrate at a preset holding position; transferring the substrate from the arm to a placing table via lift pins; receiving the substrate back by the arm via the lift pins; and detecting a new holding position of the substrate. Based on the new holding position, it is determined whether the substrate was mounted on an edge portion. A target position for transfer from the arm to the placing table is determined according to the set positions for the reference axes, and the target position is set as the arm's set position.