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This is a record of a document published elsewhere, first published by the United States Patent and Trademark Office, as US-5067762-A, on 26 November 1991. OpenTechnical did not first disclose it. The identifier, hashes and timestamps below record what this library served and when, not when the material became public. View the original.

OT-2026-000003410

Non-contact conveying device

Published
Permanent URL
Classification
Robotics & Automation › Robot Architectures
Inventors
AKASHI HIROSHI
Assignee
AKASHI HIROSHI
Original source
US-5067762-A, the United States Patent and Trademark Office, 26 November 1991
Document SHA-256
dcfcf6d3ebe84e186b8c85ce756667f8359a3f0e9d05903363be8716986abcaa

A non-contact conveying device for lifting and/or supporting wafer-like articles without physical contact with the articles. The device has a pickup head with a cuhsion-vacuum room fully opened at its bottom and has an ejector opening located at the center of its upper wall and communicating with the cushion-vacuum room of the pickup head. The ejector opening is coupled to a positive pressure gas supply. The pickup head has an operating surface at the bottom of the side wall which is positioned adjacnet to an article to be lifted. In the case of a wide clearance existing between the operating surface and the article, the non-contact conveying device works as an ejector and the pressure within the cushion-vacuum room is decreased since the cushion-vacuum room acts in the manner of a vacuum room of an ejector and the space formed between the operating surface and the article acts in the manner of a diffuser of an ejector. In the case of a small clearance existing between the cushion-vacuum room and the article, the non-contact conveying device operates like a hovercraft and the pressure with the cushion-vacuum room increases, since the cushion-vacuum room acts in manner of a pressure room of a hovercraft.

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Abstract

A non-contact conveying device for lifting and/or supporting wafer-like articles without physical contact with the articles. The device has a pickup head with a cuhsion-vacuum room fully opened at its bottom and has an ejector opening located at the center of its upper wall and communicating with the cushion-vacuum room of the pickup head. The ejector opening is coupled to a positive pressure gas supply. The pickup head has an operating surface at the bottom of the side wall which is positioned adjacnet to an article to be lifted. In the case of a wide clearance existing between the operating surface and the article, the non-contact conveying device works as an ejector and the pressure within the cushion-vacuum room is decreased since the cushion-vacuum room acts in the manner of a vacuum room of an ejector and the space formed between the operating surface and the article acts in the manner of a diffuser of an ejector. In the case of a small clearance existing between the cushion-vacuum room and the article, the non-contact conveying device operates like a hovercraft and the pressure with the cushion-vacuum room increases, since the cushion-vacuum room acts in manner of a pressure room of a hovercraft.

1. Drawings

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Publication information

Plain textMarkdownManifestIntegrity record

Citation

OpenTechnical Publication OT-2026-000003410, “Non-contact conveying device,” published September 15, 2026 at 20:24:10 UTC, https://opentechnical.org/p/OT-2026-000003410.

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Terms

This record reproduces a document published elsewhere and is provided for reference and study. Rights in the original remain with its owner. See the publication policy.