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This is a record of a document published elsewhere, first published by the United States Patent and Trademark Office, as US-12600014-B2, on 14 April 2026. OpenTechnical did not first disclose it. The identifier, hashes and timestamps below record what this library served and when, not when the material became public. View the original.

OT-2026-000000825

Method and apparatus for holding substrate

Published
Permanent URL
Classification
Tools & Tooling › Clamping Tools
Original source
US-12600014-B2, the United States Patent and Trademark Office, 14 April 2026
Document SHA-256
83cd7eea8650a0699ae2e9cfe3c8dbae3123a1d01269b6382d963cdbdbbdeb1a

Abstract

An apparatus for holding a substrate includes a table, a lifting and lowering mechanism configured to mount a substrate on the table, and at least one pressing member configured to press the substrate to the table from the peripheral side of the substrate, in which the pressing member is movable upward and downward. The apparatus further includes at least one detector configured to detect a warp of the substrate mounted on the table from a peripheral side of the substrate, and a controller configured to control a movement of the pressing member in accordance to the detected warp.

Publication information

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Citation

OpenTechnical Publication OT-2026-000000825, “Method and apparatus for holding substrate,” published September 15, 2026 at 19:03:27 UTC, https://opentechnical.org/p/OT-2026-000000825.

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This record reproduces a document published elsewhere and is provided for reference and study. Rights in the original remain with its owner. See the publication policy.