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This is a record of a document published elsewhere, first published by the United States Patent and Trademark Office, as US-12601582-B2, on 14 April 2026. OpenTechnical did not first disclose it. The identifier, hashes and timestamps below record what this library served and when, not when the material became public. View the original.

OT-2026-000000844

Detection system, compensation method, and computer readable medium for semiconductor surface morphology

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Sensors, Controls & Machine Vision › Position and Presence Sensing
Original source
US-12601582-B2, the United States Patent and Trademark Office, 14 April 2026
Document SHA-256
9db361d81506b6c3be8e7ac92d89c9da6bb9af73b1f847078c2ae1cd4131f0ba

Abstract

Provided are a detection system, compensation method and computer-readable recording medium applicable to semiconductor surface morphology to provide feature information corresponding to spectral signals to a neural network model and provide feature information corresponding to spectral signals, a detected height, and an actual height actually measured to another neural network model. The combinational neural network models thus trained and built can generate a compensation value for a to-correct height corresponding to a to-correct spectral signal having variability. The compensation value provides required compensation for height information to not only enhance the precision of the detection of semiconductor surface morphology but also enhance the reliability of the detection system.

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Citation

OpenTechnical Publication OT-2026-000000844, “Detection system, compensation method, and computer readable medium for semiconductor surface morphology,” published September 15, 2026 at 19:03:28 UTC, https://opentechnical.org/p/OT-2026-000000844.

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This record reproduces a document published elsewhere and is provided for reference and study. Rights in the original remain with its owner. See the publication policy.