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This is a record of a document published elsewhere, first published by the United States Patent and Trademark Office, as US-2026091510-A1, on 2 April 2026. OpenTechnical did not first disclose it. The identifier, hashes and timestamps below record what this library served and when, not when the material became public. View the original.

OT-2026-000001174

Substrate transfer apparatus and substrate transfer method

Published
Permanent URL
Classification
Robotics & Automation › Robot Architectures
Inventors
NAKAHARA HAJIME, TAN HARUHIKO
Assignee
KAWASAKI HEAVY IND LTD, KAWASAKI ROBOTICS USA INC
Original source
US-2026091510-A1, the United States Patent and Trademark Office, 2 April 2026
Document SHA-256
8690c772a91e6caba7674056a0f2f1ff006e2588d5ffe95e702cf661fc8819f9

Abstract

A substrate transfer apparatus according to one or more embodiments may include substrate transfer apparatus including: an end effector including: a hand that grips a substrate; and a plunger that comes into contact with the substrate and performs alignment of the substrate comprising a contact portion that comes into contact with the substrate by moving in a substrate direction. A contact portion of the substrate transfer apparatus according to one or more embodiments includes a contact bottom surface that comes into contact with the substrate and is inclined so that a thickness decreases toward a tip of the contact portion.

Publication information

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Citation

OpenTechnical Publication OT-2026-000001174, “Substrate transfer apparatus and substrate transfer method,” published September 15, 2026 at 19:03:58 UTC, https://opentechnical.org/p/OT-2026-000001174.

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This record reproduces a document published elsewhere and is provided for reference and study. Rights in the original remain with its owner. See the publication policy.