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This is a record of a document published elsewhere, first published by the United States Patent and Trademark Office, as US-2026091505-A1, on 2 April 2026. OpenTechnical did not first disclose it. The identifier, hashes and timestamps below record what this library served and when, not when the material became public. View the original.

OT-2026-000001215

Substrate transfer apparatus and substrate transfer method

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Classification
Robotics & Automation › Robot Architectures
Inventors
KURATA IORI, NAKAHARA HAJIME, TAN HARUHIKO
Assignee
KAWASAKI HEAVY IND LTD, KAWASAKI ROBOTICS USA INC
Original source
US-2026091505-A1, the United States Patent and Trademark Office, 2 April 2026
Document SHA-256
e8b47db2343dbc115da7127ee3b25fd24ee240732f53f9632a5ff22a61e2bb3e

Abstract

A substrate transfer method according to one or more embodiments is disclosed that may include moving a hand of a substrate transfer apparatus to a lower part of a substrate, moving a plunger of the substrate transfer apparatus to increase a pocket size that is a distance between a substrate contact portion of the hand and the plunger of the substrate transfer apparatus, picking up the substrate, and moving the plunger to decrease the distance between the substrate contact portion and the plunger of the substrate transfer apparatus and to a position that the substrate is not gripped.

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Citation

OpenTechnical Publication OT-2026-000001215, “Substrate transfer apparatus and substrate transfer method,” published September 15, 2026 at 19:04:11 UTC, https://opentechnical.org/p/OT-2026-000001215.

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