OpenTechnical
This is a record of a document published elsewhere, first published by the United States Patent and Trademark Office, as US-2026084297-A1, on 26 March 2026. OpenTechnical did not first disclose it. The identifier, hashes and timestamps below record what this library served and when, not when the material became public. View the original.

OT-2026-000001405

Automatic Teaching System and Automatic Teaching Method Thereof

Published
Permanent URL
Classification
Robotics & Automation › Robot Architectures
Inventors
LEE HSIU-YU, TSENG KUO-FENG, YANG HAO-YU
Assignee
BRIGHTEST TECH TAIWAN CO LTD
Original source
US-2026084297-A1, the United States Patent and Trademark Office, 26 March 2026
Document SHA-256
1d6dea0318bd16fcaf1d1d6af23ba973ef47f103aa9df75b2ff292a7bde24c74

Abstract

An automatic teaching system configured for teaching a position of a semiconductor wafer relative to a semiconductor system includes a dummy wafer with a mark and a first sensor fixed to a first device. The semiconductor system includes the first device, which includes a holder, and a second device, which includes an end effector configured to transport the semiconductor wafer between the first device and the second device. The dummy wafer is or is to be either removed from the holder by the end effector or placed on the holder by the end effector. The first sensor is configured to determine a position of the dummy wafer by locating two opposite first edge-points of the mark after the end effector moves the dummy wafer back and forth along a first axis within the first device.

Publication information

Plain textMarkdownManifestIntegrity record

Citation

OpenTechnical Publication OT-2026-000001405, “Automatic Teaching System and Automatic Teaching Method Thereof,” published September 15, 2026 at 19:05:38 UTC, https://opentechnical.org/p/OT-2026-000001405.

To cite specific content, add the paragraph or figure numbers.

Terms

This record reproduces a document published elsewhere and is provided for reference and study. Rights in the original remain with its owner. See the publication policy.