Abstract
A conveying apparatus for conveying a plate-shaped workpiece includes a holding unit that holds the plate-shaped workpiece under suction, a moving unit that moves in a vertical direction together with the holding unit, a detection unit that detects that the holding unit has moved downward and made contact with the plate-shaped workpiece, and a control unit that performs control to stop a downward movement of the moving unit when the detection unit detects that the holding unit has made contact with the plate-shaped workpiece.