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This is a record of a document published elsewhere, first published by the United States Patent and Trademark Office, as US-2026070759-A1, on 12 March 2026. OpenTechnical did not first disclose it. The identifier, hashes and timestamps below record what this library served and when, not when the material became public. View the original.

OT-2026-000001974

Substrate handling robot lifting arrangement and method thereof

Published
Permanent URL
Classification
Lifting, Positioning & Manipulation › Hoists and Cranes
Inventors
OKABE TAIRA, SIVARAMAN SENTHIL
Assignee
ASM IP HOLDING BV
Original source
US-2026070759-A1, the United States Patent and Trademark Office, 12 March 2026
Document SHA-256
26243d0128b79d302f6ae6897105b6d69595af8a265157cd90ce2b008baf450e

Abstract

A robot lifting arrangement is provided. The robot lifting arrangement includes a robot lifting crane that is configured to lift a substrate handling robot to an elevated position. The robot lifting arrangement also includes a track section that may extend from a chamber on the platform to an external area. Robot lifting crane may lift the robot from the chamber and transport it along the track to the external area for repair/maintenance or lift the robot from the external area and transport it along the track back to the chamber for installation into the chamber.

Publication information

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Citation

OpenTechnical Publication OT-2026-000001974, “Substrate handling robot lifting arrangement and method thereof,” published September 15, 2026 at 19:09:54 UTC, https://opentechnical.org/p/OT-2026-000001974.

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Terms

This record reproduces a document published elsewhere and is provided for reference and study. Rights in the original remain with its owner. See the publication policy.