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This is a record of a document published elsewhere, first published by the United States Patent and Trademark Office, as US-12570485-B2, on 10 March 2026. OpenTechnical did not first disclose it. The identifier, hashes and timestamps below record what this library served and when, not when the material became public. View the original.

OT-2026-000002067

Substrate transfer apparatus using upper and lower magnetic levitation rails

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Classification
Material Handling › Conveying Systems
Inventors
CHOI WOO HYUNG, LEE SANG WOO
Assignee
VM INC
Original source
US-12570485-B2, the United States Patent and Trademark Office, 10 March 2026
Document SHA-256
40d25cb60573ad9b06cf0b271612ca3e330b6f88e765511b6f5401fa9a74f08b

Abstract

Disclosed is a substrate transfer apparatus including a moving plate including an upper magnetic levitation rail and a lower magnetic levitation rail, a processing chamber disposed adjacent to the moving plate and that processes a substrate, and a shuttle disposed between the upper magnetic levitation rail and the lower magnetic levitation rail, being moved on the moving plate, and that accommodates the substrate.

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Citation

OpenTechnical Publication OT-2026-000002067, “Substrate transfer apparatus using upper and lower magnetic levitation rails,” published September 15, 2026 at 19:10:33 UTC, https://opentechnical.org/p/OT-2026-000002067.

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