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This is a record of a document published elsewhere, first published by the United States Patent and Trademark Office, as US-12564974-B2, on 3 March 2026. OpenTechnical did not first disclose it. The identifier, hashes and timestamps below record what this library served and when, not when the material became public. View the original.

OT-2026-000002359

Factory interface with redundancy

Published
Permanent URL
Classification
Robotics & Automation › Robot Architectures
Inventors
HUDGENS JEFFREY C, IKEDA KRISTEN, KOSHTI SUSHANT S, REUTER PAUL BENJAMIN
Assignee
APPLIED MATERIALS INC
Original source
US-12564974-B2, the United States Patent and Trademark Office, 3 March 2026
Document SHA-256
684486c38981424fd494a2f71c7f51561b537a91d10e042ccb6fb8f53ed0b6c6

Abstract

A substrate processing system for an electronic device manufacturing system can include a factory interface forming an interior volume, and a partition disposed in the factory interface. The partition can divide the interior volume into a first factory interface chamber forming a second interior volume, and a second factory interface chamber forming a third interior volume. The partition can be configured to provide a first sealed environment in the first factory interface chamber and a second sealed environment in the second factory interface chamber.

Publication information

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Citation

OpenTechnical Publication OT-2026-000002359, “Factory interface with redundancy,” published September 15, 2026 at 19:12:29 UTC, https://opentechnical.org/p/OT-2026-000002359.

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This record reproduces a document published elsewhere and is provided for reference and study. Rights in the original remain with its owner. See the publication policy.