Abstract
An end effector is described which is suitable for handling both wafers and wafer cassettes. The end effector has a first gripping unit configured to pick up and hold individual wafers and a second gripping unit configured to pick up and hold a wafer cassette, wherein the first and second gripping units are connected to each other in such a way that they can be attached to a common robot arm and that they are arranged at an angle to each other so that they do not interfere with each other during operation.