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This is a record of a document published elsewhere, first published by the United States Patent and Trademark Office, as US-5913653-A, on 22 June 1999. OpenTechnical did not first disclose it. The identifier, hashes and timestamps below record what this library served and when, not when the material became public. View the original.

OT-2026-000003187

Device for transporting substrates

Published
Permanent URL
Classification
Tools & Tooling › Clamping Tools
Assignee
SINGULUS TECHNOLOGIES GMBH
Original source
US-5913653-A, the United States Patent and Trademark Office, 22 June 1999
Document SHA-256
e018a0af4dee7f44f1678b9ea54e7de6af53c85f346551a5968fbde132a4b316

Apparatus for transporting substrates to and from at least one device (1) for holding substrates (2), the at least one device having a substrate support (5) disposed in a vacuum chamber (4, 4', 4"). The apparatus includes at least one displaceably disposed gripper (75), which can be displaced by a mechanical and/or electro-magnetically or magnetically operating positioning device (130) between a substrate gripping position and a substrate release position, and a centering device (157, 157', 161) for centering a substrate relative to the substrate support in conjunction with transport of the substrate by the apparatus to the substrate support.

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Abstract

Apparatus for transporting substrates to and from at least one device (1) for holding substrates (2), the at least one device having a substrate support (5) disposed in a vacuum chamber (4, 4', 4"). The apparatus includes at least one displaceably disposed gripper (75), which can be displaced by a mechanical and/or electro-magnetically or magnetically operating positioning device (130) between a substrate gripping position and a substrate release position, and a centering device (157, 157', 161) for centering a substrate relative to the substrate support in conjunction with transport of the substrate by the apparatus to the substrate support.

1. Drawings

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Publication information

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Citation

OpenTechnical Publication OT-2026-000003187, “Device for transporting substrates,” published September 15, 2026 at 19:46:03 UTC, https://opentechnical.org/p/OT-2026-000003187.

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This record reproduces a document published elsewhere and is provided for reference and study. Rights in the original remain with its owner. See the publication policy.