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This is a record of a document published elsewhere, first published by the United States Patent and Trademark Office, as US-5656781-A, on 12 August 1997. OpenTechnical did not first disclose it. The identifier, hashes and timestamps below record what this library served and when, not when the material became public. View the original.

OT-2026-000003245

Capacitive pressure transducer structure with a sealed vacuum chamber formed by two bonded silicon wafers

Published
Permanent URL
Classification
Sensors, Controls & Machine Vision › Force and Pressure Sensing
Original source
US-5656781-A, the United States Patent and Trademark Office, 12 August 1997
Document SHA-256
3bf702f82f505d4c999d8c0ecf940cd244acd66efa29103e1c023873edde63e2

Drawing sheets for capacitive pressure transducer structure with a sealed vacuum chamber formed by two bonded silicon wafers, reproduced from the published facsimile. The written description is in the original document, which is linked above.

Sheet 1
Sheet 1
Sheet 2
Sheet 2
Sheet 3
Sheet 3

Abstract

Drawing sheets for capacitive pressure transducer structure with a sealed vacuum chamber formed by two bonded silicon wafers, reproduced from the published facsimile. The written description is in the original document, which is linked above.

1. Drawings

[0001]Sheet 1.

[0002]Sheet 2.

[0003]Sheet 3.

Publication information

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Citation

OpenTechnical Publication OT-2026-000003245, “Capacitive pressure transducer structure with a sealed vacuum chamber formed by two bonded silicon wafers,” published September 15, 2026 at 19:55:55 UTC, https://opentechnical.org/p/OT-2026-000003245.

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This record reproduces a document published elsewhere and is provided for reference and study. Rights in the original remain with its owner. See the publication policy.