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This is a record of a document published elsewhere, first published by the United States Patent and Trademark Office, as US-5259603-A, on 9 November 1993. OpenTechnical did not first disclose it. The identifier, hashes and timestamps below record what this library served and when, not when the material became public. View the original.

OT-2026-000003362

Device for mounting and transporting substrates in vacuum apparatus

Published
Permanent URL
Classification
Material Handling › Conveying Systems
Inventors
GEISLER MICHAEL, JUNG MICHAEL
Assignee
LEYBOLD AG
Original source
US-5259603-A, the United States Patent and Trademark Office, 9 November 1993
Document SHA-256
6c4c78bb385885094c4d60cafa947635c9e179bc501694696476fba6f1f57190

Device for mounting thin, preferably flat substrates (11, 11', . . . ) and for the transport of these substrates (11, 11'. . . ) in treatment apparatus, for example vacuum coating and etching apparatus, the device being formed by a frame (1), preferably in a rectangular shape, which is of such size that in the area surrounded by the frame (1) a support, e.g., a support formed of spoke-like round rods (6, 6', . . . ). can be inserted, and on this support fastening means for mounting the substrates (11, 11', . . . ) are provided, which hold the substrates (11, 11', . . . ) such that their substantially planar lateral surfaces run approximately parallel to the plane of the frame.

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Abstract

Device for mounting thin, preferably flat substrates (11, 11', . . . ) and for the transport of these substrates (11, 11'. . . ) in treatment apparatus, for example vacuum coating and etching apparatus, the device being formed by a frame (1), preferably in a rectangular shape, which is of such size that in the area surrounded by the frame (1) a support, e.g., a support formed of spoke-like round rods (6, 6', . . . ). can be inserted, and on this support fastening means for mounting the substrates (11, 11', . . . ) are provided, which hold the substrates (11, 11', . . . ) such that their substantially planar lateral surfaces run approximately parallel to the plane of the frame.

1. Drawings

[0001]Sheet 1.

[0002]Sheet 2.

[0003]Sheet 3.

Publication information

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Citation

OpenTechnical Publication OT-2026-000003362, “Device for mounting and transporting substrates in vacuum apparatus,” published September 15, 2026 at 20:16:09 UTC, https://opentechnical.org/p/OT-2026-000003362.

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