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This is a record of a document published elsewhere, first published by the United States Patent and Trademark Office, as US-5080549-A, on 14 January 1992. OpenTechnical did not first disclose it. The identifier, hashes and timestamps below record what this library served and when, not when the material became public. View the original.

OT-2026-000003406

Wafer handling system with Bernoulli pick-up

Published
Permanent URL
Classification
Robotics & Automation › Robot Architectures
Inventors
CRABB RICHARD, FERRO ARMAND P, GOODWIN DENNIS L, ROBINSON MCDONALD
Assignee
EPSILON TECHN INC
Original source
US-5080549-A, the United States Patent and Trademark Office, 14 January 1992
Document SHA-256
b874c64ab331cd11a01adbe86dfba0d3528df5981ffb5d8d4d42fcd3c08a304f

Wafer handling apparatus operating under the Bernoulli principle to pick up, transport and deposit wafers, which apparatus includes a plate having a plurality of laterally oriented outlets and a central outlet for discharging gas in a pattern sufficient to develop a low pressure enviroment to pick up the wafer while bathing the wafer in radially outflowing gases to prevent intrusion and deposition on the wafer of particulate matter in suspension.

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Abstract

Wafer handling apparatus operating under the Bernoulli principle to pick up, transport and deposit wafers, which apparatus includes a plate having a plurality of laterally oriented outlets and a central outlet for discharging gas in a pattern sufficient to develop a low pressure enviroment to pick up the wafer while bathing the wafer in radially outflowing gases to prevent intrusion and deposition on the wafer of particulate matter in suspension.

1. Drawings

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Publication information

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Citation

OpenTechnical Publication OT-2026-000003406, “Wafer handling system with Bernoulli pick-up,” published September 15, 2026 at 20:23:33 UTC, https://opentechnical.org/p/OT-2026-000003406.

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This record reproduces a document published elsewhere and is provided for reference and study. Rights in the original remain with its owner. See the publication policy.