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This is a record of a document published elsewhere, first published by the United States Patent and Trademark Office, as US-2026104250-A1, on 16 April 2026. OpenTechnical did not first disclose it. The identifier, hashes and timestamps below record what this library served and when, not when the material became public. View the original.

OT-2026-000000494

Shape profile measurement device, shape profile measurement method, and semiconductor device manufacturing method including the same

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Sensors, Controls & Machine Vision › Position and Presence Sensing
Original source
US-2026104250-A1, the United States Patent and Trademark Office, 16 April 2026
Document SHA-256
0126c3a681d35a3d0f61cdcadbc2eccb517ea88164f0a92c9ed9f8f23847ba96

Abstract

A shape profile measurement device includes a light source emitting an optical pulse stream, a relay optical system configured to receive the optical pulse stream, generate an electrical pulse stream from a first portion of the optical pulse stream, generate a chromatically dispersed light over a plurality of wavelengths from a second portion of the optical pulse stream, provide the chromatically dispersed light to a measurement target, and output a reflected optical pulse stream reflected from the measurement target, a detector configured to receive the electrical pulse stream and the reflected optical pulse stream and detect a phase difference between the electrical pulse stream and the reflected optical pulse stream, and a processor configured to generate a shape profile of the measurement target using the phase difference.

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OpenTechnical Publication OT-2026-000000494, “Shape profile measurement device, shape profile measurement method, and semiconductor device manufacturing method including the same,” published September 15, 2026 at 19:02:58 UTC, https://opentechnical.org/p/OT-2026-000000494.

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