OpenTechnical
This is a record of a document published elsewhere, first published by the United States Patent and Trademark Office, as US-2026104244-A1, on 16 April 2026. OpenTechnical did not first disclose it. The identifier, hashes and timestamps below record what this library served and when, not when the material became public. View the original.

OT-2026-000000559

Shape profile measurement device, shape profile measurement method, and semiconductor manufacturing method including the same

Published
Permanent URL
Classification
Sensors, Controls & Machine Vision › Position and Presence Sensing
Original source
US-2026104244-A1, the United States Patent and Trademark Office, 16 April 2026
Document SHA-256
ca94563e4a66dc25a1dbe7fd33559f0dab37999716d520893b8dd53e3d077580

Abstract

A shape profile measurement device includes a light source configured to generate and emit a light signal, a relay optical system configured to receive the light signal from the light source, perform axial chromatic aberration on the light signal, emit a chromatically dispersed light signal over a plurality of wavelengths to a measurement target, and output a reflected light signal reflected from the measurement target, wherein the chromatically dispersed light signal is focused at different positions along an optical axis of the light signal, a detector configured to detect a wavelength of the reflected light signal, among the plurality of wavelengths, received from the relay optical system; and a processor configured to calculate a shape profile of the measurement target based on a focal position of the wavelength of the reflected light signal.

Publication information

Plain textMarkdownManifestIntegrity record

Citation

OpenTechnical Publication OT-2026-000000559, “Shape profile measurement device, shape profile measurement method, and semiconductor manufacturing method including the same,” published September 15, 2026 at 19:03:04 UTC, https://opentechnical.org/p/OT-2026-000000559.

To cite specific content, add the paragraph or figure numbers.

Terms

This record reproduces a document published elsewhere and is provided for reference and study. Rights in the original remain with its owner. See the publication policy.