OpenTechnical
This is a record of a document published elsewhere, first published by the United States Patent and Trademark Office, as US-12601584-B2, on 14 April 2026. OpenTechnical did not first disclose it. The identifier, hashes and timestamps below record what this library served and when, not when the material became public. View the original.

OT-2026-000000691

Measurement method of surface shape and surface shape measurement device

Published
Permanent URL
Classification
Sensors, Controls & Machine Vision › Position and Presence Sensing
Original source
US-12601584-B2, the United States Patent and Trademark Office, 14 April 2026
Document SHA-256
9cece208db36ff014ce50dc0363c58e2635886ba48046a487eda432135d4664d

Abstract

A measurement method of a surface shape and a surface shape measurement device uses an interferometer optical head that acquires an interference fringe image generated by a light path difference between the reference light and the measurement light, acquires N interference fringe images by scanning from a start point to an end point in the Z-axis direction, and measures the surface shape of the measurement target surface based on the interference fringe images. For a common position in the N interference fringe images, regarding an interference signal including values of N points that indicates a change in the interference light intensity along the Z-axis direction, a phase of an interference fringe produced by the light of a predetermined analysis wavelength is determined, and the relative position in the Z-axis direction of the measurement target surface within the range of the analysis wavelength is determined based on the phase.

Publication information

Plain textMarkdownManifestIntegrity record

Citation

OpenTechnical Publication OT-2026-000000691, “Measurement method of surface shape and surface shape measurement device,” published September 15, 2026 at 19:03:15 UTC, https://opentechnical.org/p/OT-2026-000000691.

To cite specific content, add the paragraph or figure numbers.

Terms

This record reproduces a document published elsewhere and is provided for reference and study. Rights in the original remain with its owner. See the publication policy.