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This is a record of a document published elsewhere, first published by the United States Patent and Trademark Office, as US-12588466-B2, on 24 March 2026. OpenTechnical did not first disclose it. The identifier, hashes and timestamps below record what this library served and when, not when the material became public. View the original.

OT-2026-000001581

Article storage equipment in semiconductor fabrication facility and logistics system including same

Published
Permanent URL
Classification
Material Handling › Conveying Systems
Inventors
LEE SUNG HO
Assignee
SEMES CO LTD
Original source
US-12588466-B2, the United States Patent and Trademark Office, 24 March 2026
Document SHA-256
78f20917d99f425fea9d9d218b2341aa1800af8f458e79afd02f6875188c5338

Abstract

Proposed are article storage equipment in a semiconductor fabrication facility, the article storage equipment being capable of power supply with a more simplified configuration, and a logistics system of a semiconductor fabrication facility including the same. Article storage equipment in a semiconductor fabrication facility according to one aspect includes a storage unit installed around a rail that provides a travel route of a transport vehicle and configured to store a transport container in which a wafer is accommodated, a purge unit configured to supply an inert gas into the transport container, a control unit configured to identify the transport container stored in the storage unit and control the purge unit to supply the inert gas into the transport container, and a power supply unit configured to supply a current induced from a power supply cable installed along the rail to the control unit.

Publication information

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Citation

OpenTechnical Publication OT-2026-000001581, “Article storage equipment in semiconductor fabrication facility and logistics system including same,” published September 15, 2026 at 19:06:48 UTC, https://opentechnical.org/p/OT-2026-000001581.

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Terms

This record reproduces a document published elsewhere and is provided for reference and study. Rights in the original remain with its owner. See the publication policy.