Abstract
A replacement robot includes a robot body, a robot arm on the robot body, an equipment cap gripper on the robot arm and configured to open and close an equipment cap module connected to a chemical container, the chemical container being an empty container, and a container table on the robot body. The container table includes a table body, a first container case on the table body and configured to accommodate an empty container, a second container case on the table body and configured to accommodate a full container, and a case driving device configured to rotate the first container case toward the second container case.