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This is a record of a document published elsewhere, first published by the United States Patent and Trademark Office, as US-2026054394-A1, on 26 February 2026. OpenTechnical did not first disclose it. The identifier, hashes and timestamps below record what this library served and when, not when the material became public. View the original.

OT-2026-000002486

Substrate transfer apparatus, and substrate processing system and substrate processing apparatus including the same

Published
Permanent URL
Classification
Robotics & Automation › Robot Architectures
Inventors
IWASAKI AKIHIRO
Assignee
SCREEN HOLDINGS CO LTD
Original source
US-2026054394-A1, the United States Patent and Trademark Office, 26 February 2026
Document SHA-256
5e4ad927d93383684de73d9a5b9b7c483f51c2784b4c70f42bc1296c15872752

Abstract

A dry substrate hand of the present invention includes a first branch blade, a pair of proximal end guides provided at a proximal end portion of the first branch blade and in contact with a substrate end portion, and a pair of distal end guides provided at a distal end portion of the first branch blade and in contact with the substrate end portion. The wet substrate hand of the present invention includes a second branch blade, a pair of proximal end protrusions provided at a proximal end portion of the second branch blade and in contact with a lower surface of a substrate to support the substrate, and a pair of distal end protrusions provided at a distal end portion of the second branch blade and in contact with the lower surface of the substrate to support the substrate.

Publication information

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Citation

OpenTechnical Publication OT-2026-000002486, “Substrate transfer apparatus, and substrate processing system and substrate processing apparatus including the same,” published September 15, 2026 at 19:13:23 UTC, https://opentechnical.org/p/OT-2026-000002486.

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