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This is a record of a document published elsewhere, first published by the United States Patent and Trademark Office, as US-12564012-B2, on 24 February 2026. OpenTechnical did not first disclose it. The identifier, hashes and timestamps below record what this library served and when, not when the material became public. View the original.

OT-2026-000002620

Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools

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Classification
Robotics & Automation › Robot Architectures
Inventors
BAJAJ GEETIKA, DHAYALAN ARUN, FENWICK DAVID, GORADIA PRERNA, HE XIAOMING, HUDGENS JEFF, MUTHUKAMATCHY KARUPPASAMY, NATU GAYATRI, SEPPAELAE SANNI, SUN JENNIFER, THAKARE DARSHAN, THANU RAJKUMAR
Assignee
APPLIED MATERIALS INC
Original source
US-12564012-B2, the United States Patent and Trademark Office, 24 February 2026
Document SHA-256
1974384afd4db2847d2ab064c730141b803122f966d036500002a1a77bc603f0

Abstract

A coated chamber component comprises a chamber component and a coating deposited on a surface of the chamber component, the coating comprising an electrically-dissipative material. The electrically-dissipative material is to provide a dissipative path from the coating to a ground. The coating is uniform, conformal, and has a thickness ranging from about 10 nm to about 900 nm.

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Citation

OpenTechnical Publication OT-2026-000002620, “Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools,” published September 15, 2026 at 19:14:14 UTC, https://opentechnical.org/p/OT-2026-000002620.

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