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This is a record of a document published elsewhere, first published by the United States Patent and Trademark Office, as US-2026042225-A1, on 12 February 2026. OpenTechnical did not first disclose it. The identifier, hashes and timestamps below record what this library served and when, not when the material became public. View the original.

OT-2026-000003005

Substrate transfer device and method for determining abnormality of substrate transfer device

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Classification
Robotics & Automation › Robot Architectures
Inventors
BAE HYEONG HWAN, HYON JUN JIN, KO HYEONG SIK, MIN JUNG KI, SONG BYOUNG GYU
Assignee
EUGENE TECHNOLOGY CO LTD
Original source
US-2026042225-A1, the United States Patent and Trademark Office, 12 February 2026
Document SHA-256
53f5bb8284f6b53968da09870a84ef32900119f5be79fd7796907d46ddfc09c3

Abstract

The present inventive concept relates to a substrate transfer device that detects an abnormality of a plurality of end-effectors and a method for determining an abnormality of the substrate transfer device. The substrate transfer device includes: a plurality of end-effectors extending in a first direction and disposed in multi-stages in a second direction crossing the first direction to support substrates, respectively; an interval adjustment unit configured to adjust an interval between the plurality of end-effectors; and an abnormality detection unit configured to detect an abnormality of each of the plurality of end-effectors, wherein the plurality of end-effectors may include: a reference end-effector that is fixed in position; and a variable end-effector that is adjusted in distance from the reference end-effector with respect to the reference end-effector.

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Citation

OpenTechnical Publication OT-2026-000003005, “Substrate transfer device and method for determining abnormality of substrate transfer device,” published September 15, 2026 at 19:16:41 UTC, https://opentechnical.org/p/OT-2026-000003005.

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