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This is a record of a document published elsewhere, first published by the United States Patent and Trademark Office, as US-2026047376-A1, on 12 February 2026. OpenTechnical did not first disclose it. The identifier, hashes and timestamps below record what this library served and when, not when the material became public. View the original.

OT-2026-000003008

Substrate transfer apparatus and substrate processing system including the same

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Classification
Robotics & Automation › Robot Architectures
Inventors
CHO JU YEON, KIM BYEONG KWAN, KIM MIN WOO, KIM MIN YOUNG, LEE JOON HEE, YU JAE SEUNG
Assignee
SEMES CO LTD
Original source
US-2026047376-A1, the United States Patent and Trademark Office, 12 February 2026
Document SHA-256
39b88865c0c57ba746c24e01c4a3589d7a41e00502214a32ed232706a56b5e62

Abstract

Disclosed is a substrate transfer apparatus disposed in a transfer chamber, the substrate transfer apparatus including: a robot main body having hands supporting a substrate; and a driving unit for moving the robot main body in a straight direction, wherein the driving unit includes: a driving case having an inner space; an actuator provided within the driving case, and connected to the robot main body; a cable veyor provided on one side of the actuator to guide the cable connected to the robot main body; an exhaust fan for exhausting atmosphere of the inner space; and an intake manifold for receiving suction force of the exhaust fan through a first intake path connected to the exhaust fan to intake a space where the cable veyor is located.

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Citation

OpenTechnical Publication OT-2026-000003008, “Substrate transfer apparatus and substrate processing system including the same,” published September 15, 2026 at 19:16:43 UTC, https://opentechnical.org/p/OT-2026-000003008.

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